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High-purity graphite plays a crucial role in various semiconductor manufacturing processes, including crystal growth, epitaxy, ion implantation, and more. Its exceptional purity and insulation properties make it an essential material for ensuring the quality and integrity of semiconductor crystals. In specific applications, special coated graphite products are employed to enhance performance and corrosion resistance.

By using high-purity graphite, manufacturers can minimize contamination and optimize the crystal growth process, resulting in superior semiconductor products. Additionally, when necessary, special coated graphite products are chosen to provide enhanced protection and longevity.

Furthermore, to enhance its resistance to corrosion from the harsh process environment, the graphite base can be coated with a specially formulated protective coating. This coating improves the longevity of the graphite base and maintains its performance over extended periods of use.

Our Products

Furnace Graphite Heating plate

Specialized component used in high-temperature furnaces to provide efficient and uniform heating. Made from high-quality graphite, it possesses excellent thermal conductivity and resistance to extreme temperatures, ensuring reliable and consistent heat distribution for various industrial heating processes.

Graphite susceptors

Specialized components used in semiconductor manufacturing processes, particularly in chemical vapor deposition (CVD) and physical vapor deposition (PVD). These susceptors, made from high-purity graphite, provide a stable platform for the deposition of thin films, ensuring uniform heat distribution and efficient growth of semiconductor layers for precise and reliable device fabrication.

Graphite three-petal pot

Specialized graphite container with a unique three-petal shape. This design allows for efficient and uniform heat distribution, making it ideal for applications such as chemical reactions, crucible furnaces, and other high-temperature processes where precise heat control and thermal stability are crucial.

Thermal Field Semiconductor

Implementation of thermal management techniques and materials to regulate and control temperature in semiconductor devices, ensuring optimal performance, reliability, and preventing overheating-related issues.

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Graphite components find extensive use in ion implanters, which are critical in the doping process of semiconductor devices. The precise control and delivery of ions to specific regions of the semiconductor wafer require reliable and durable graphite components. High-purity graphite is selected for its exceptional chemical resistance and stability under high temperatures, ensuring accurate and consistent ion implantation.

In the thermal field of crystal growth furnaces, graphite components are employed for their excellent thermal conductivity and stability. These components facilitate uniform heat distribution, creating optimal conditions for crystal growth. The ability of high-purity graphite to withstand extreme temperatures and its excellent thermal conductivity contribute to efficient and controlled crystal growth processes.

Graphite components play a vital role in physical vapor deposition (PVD) and chemical vapor deposition (CVD) equipment. These techniques are widely used for thin film deposition and layering processes in semiconductor manufacturing. Graphite components, such as crucibles and susceptors, provide the necessary thermal stability, high melting point, and chemical resistance required for these processes. Their exceptional mechanical properties ensure consistent and reliable performance during deposition and layering operations.

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